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Project TitleOptically Stabilized Inertial Measurement Sensors
Track Code5162
Short Description

The technology is a generic platform for in-situ calibration of inertial sensors, that improves sensor performance by correcting for changes that occur over time via a rotor that can be positioned at any angle and also be actuated to provide stimulus to calibrate the sensor bias and scale-factor.


One of the most challenging problems for reaching ideal MEMS inertial sensor performance is the change in bias and scale factor over time, and over environmental variables such as shock, temperature, humidity and packaging. One way to eliminate biases is to calibrate the biases actively in the sensor package itself. Micro scale stable rotating platforms with integrated inertial sensors hold the promise of performing in-situ gyroscope and accelerometer sensor calibration by applying known accelerations and rotation rates.


The technology platform consists of 1) an ultrasonic motor with a rotor which levitates creating an air bearing with smooth rotation, whose motion can be controlled without contact, and 2) a thermal actuator-driven gripper-actuator that can control the speed and direction of the rotor, without contact, while it is levitated. This same actuator can also be used to stop the rotor by direct mechanical contact. A cm-scaled system is demonstrated with 0.001 degree steps, in which the optical system can measure the rotation angle with an average measurement error of 0.0046 degrees.


Potential Commercial Applications:

Calibration platform for MEMs inertial sensors

Tagsmems, physical science, sensors
Posted DateJul 2, 2012 12:38 PM


Amit Lal

Additional Information

Licensing Contact

Patrick Govang

(607) 254-2330