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Project TitleHigh-Performance Monolithically-Integrated JFETS
Track Code5271
Short Description

A design and method is described for making Junction FETS that are monolithically integrated in NEMS or MEMS devices for enhanced signal transduction and signal processing.

Abstract

A design and method is described for making Junction FETS that are monolithically integrated in NEMS or MEMS devices for enhanced signal transduction and signal processing. Monolithic integration is preferred to the commonly-used hybrid integration because it addresses the limitations of parasitics and mismatches that prevent the hybrid process from fully realizing the highest performance.

 

Potential Commercial Applications:

  • Used with MEMS or NEMS devices, such as accelerometers, gyroscopes, switches, microfluidic devices, etc.

Advantages:

  • Increases signal to noise ratio, enabling high quality signals
  • Reduces assembly and packaging cost
 
TagsElectromechanical devices, mems, Novel Processes, physical science, Semiconductors & Integrated Circuits, signal processing, transistors
 
Posted DateMay 29, 2012 10:10 AM

Researcher

Name
Amit Lal
Kwame Amponsah

Additional Information

Licensing Contact

Patrick Govang

pjg26@cornell.edu

(607) 254-2330

Files

File Name Description
5271 non-confidential Technology Brief.pdf 5271 Technology Brief Download