Skip to main content
 
HOME FOR INVENTORS FOR INDUSTRY FOR ENTREPRENEURS
 

Details

Project TitleTrace Vapor Sensor
Track Code5066
Short Description

A novel stress-based micro/nano-electromechanical (MEMS) sensor is disclosed. The unique design consists of a polycrystalline silicon microbridge structure suspended above a silicon substrate.

Abstract

The bridge is engineered to maximize the stress sensitivity. A sensitive coating deposited on the bridge swells or contracts in the presence of the analyte, which causes a change in bridge tension and resonant frequency. In studies, these changes are large and rapid, allowing fast and accurate sensing data with an order of magnitude increase in sensitivity over existing approaches. Further, the devices are fully CMOS compatible and operate at ambient pressure. Accordingly, these MEMS sensors would be excellent, low-cost devices for everything from environmental and security monitoring to biomedical and biochemical analysis.

             Drawing of microbridge sensor illustrating resonant motion.

                

Potential Applications

  • Sensing applications including:
    • Environmental monitoring
    • Biomedical and biochemical analysis
    • Health monitoring
    • Breath gas analysis
    • Security and defense (explosives detection, etc.)

              

Advantages

  • Very high sensitivity
  • Very low power consumption
  • Low cost and CMOS compatible
  • Capable of ambient pressure operation
 
Tagscmos, Electromechanical devices, environmental sensing, mems, Sensor External Use, sensors, physical science
 
Posted DateMay 24, 2012 11:30 AM

Researcher

Name
Darren Southworth
Jeevak Parpia
Harold Craighead
Leon Bellan

Additional Information

Licensing Contact

Martin Teschl
mt439@cornell.edu
(607) 254-4454

Files

File Name Description
5066 Technology Brief.pdf 5066 Tech Brief Download